SOFT LITHOGRAPHY DEVICE AND METHOD

Author

CAU J.C, LAFFORGUE L.

Journal

Patent

Publication Date

04/26/2010

Abstract

PROBLEM TO BE SOLVED: To provide a device and a method capable of easily and efficiently controlling the application pressure of a stamp or a macro-stamp for soft lithography on a surface of a substrate, and progressing automation. ; SOLUTION: The device for soft lithography by transfer includes a flexible stamp capable of achieving a deposit of a micro-structure or a nano-structure on a substrate. In the device, the flexible stamp 1 is constituted of: a layer 3 formed of an elastomer and including a structure surface 31 capable of achieving the deposit by transfer on its one surface; and a second layer 2 which is formed of an elastomer in a state of being closely connected to a surface of the first layer 3 facing the structure surface, and formed of an elastomer with particles each formed of a soft ferromagnetic material dispersed therein

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Date added: 2012-08-08 00:00:00 | Last time updated: 2012-08-10 08:17:15 | Viewed: 892 times

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