Improved Pattern Transfer in Soft Lithography Using Composite Stamps

Author

Teri W. Odom, J. Christopher Love, Daniel B. Wolfe, Kateri E. Paul, and George M. Whitesides

Journal

Langmuir

Publication Date

04/03/2002

Abstract

Composite stamps composed of two layerssa stiff layer supported by a flexible layersextend the capabilities of soft lithography to the generation of 50-100-nm features. The preparation of these stamps was adapted from a procedure originally developed by Schmid et al. (Macromolecules 2000, 33, 3042) for microcontact printing. This paper demonstrates how pattern transfer using other soft lithographic techniquessmicromolding in capillaries, microtransfer molding, and phase-shifting lithographyscan be improved using two-layer stamps relative to stamps made of Sylgard 184 poly(dimethylsiloxane).

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Date added: 2012-11-09 15:50:14 | Last time updated: 2012-11-09 14:50:15 | Viewed: 1038 times

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