PROCESS FOR PREPARING ZINC OXIDE NANO NEEDLE STRUCTURES BY CHEMICAL VAPOR DEPOSITION

Author

KIM CHANG GYOUN [KR]; CHUNG TAEK MO [KR]; LEE YOUNG KUK [KR]; AN KI SEOK [KR]; LEE SUN SOOK [KR]

Journal

Patent

Publication Date

11/12/2007

Abstract

A method for manufacturing a zinc oxide nano needle structure is provided to grow the zinc oxide nano needle structure without using a catalyst by changing a temperature of a substrate in two steps in a chemical vapor deposition process. An SAM(Self-Assembled Molecule) film is patterned on a substrate. A zinc source and an oxygen source are introduced on the substrate and a CVD(Chemical Vapor Deposition) process is performed on the substrate except for a region for the SAM, so that a zinc oxide seed layer is formed. A CVD process is performed on the zinc oxide seed layer, so that a zinc oxide nano needle is vertically grown on the zinc oxide seed layer. The SAM is performed by a micro-contact printing scheme.

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Date added: 2012-08-22 14:02:36 | Last time updated: 2012-08-22 12:02:36 | Viewed: 768 times

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