METHODS OF PATTERNING SUBSTRATES USING MICROCONTACT PRINTED POLYMER RESISTS AND ARTICLES PREPARED THEREFROM

Author

AGARWAL SANDIP; KUGLER RALF; KURSAWE MONIKA; MAYERS BRIAN T; MCLELLAN JOSEPH M

Journal

Patent

Publication Date

10/07/2010

Abstract

The present invention is directed to methods for patterning substrates using contact printing to form patterns comprising a polymer, using the patterns formed therefrom as resists, and process products formed by the process.

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Date added: 2012-08-22 13:54:02 | Last time updated: 2012-08-22 11:54:02 | Viewed: 837 times

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