Patterning Si by using surface functionalization and microcontact printing with a polymeric ink

Author

Kyung-Bok Lee, Dong Jin Kim, Kuk Ro Yoon, Yongseong Kim and Insung S. Choi

Journal

Korean Journal of Chemical Engineering

Publication Date

01/01/2003

Abstract

This paper describes a simple procedure for patterning Si substrate using a combination of surface functionalization and microcontact printing(ΜCP). The Si/SiO2 surfaces were chemically modified to present self-assembled monolayers (SAMs) of siloxanes terminating in reactive carboxylic anhydride groups and then patterned with poly(ethylene imine) (PEI) by, ΜCP We used the patterned thin films of PEI as etch resists on Si surfaces. Key words Pattern Generation - Microcontact Printing(ΜCP) - Self-assembled Monolayers (SAMs) - Si Etching

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Date added: 2012-08-22 13:40:13 | Last time updated: 2012-08-22 11:40:13 | Viewed: 880 times

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