Microcontact Printing Directly on the Silicon Surface

Abstract

Alkoxyl thin films were deposited directly onto silicon surfaces by microcontact printing. This is based on an efficient reaction between alcohol functional groups and chlorine-terminated silicon surfaces for thin film assembly [Langmuir 2000, 16, 6766]. The features formed by microcontact printing show high resolution and fidelity, with no evidence of edge diffusion or island formation. These represent marked improvements over siloxane-based approaches.

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Microcontact Printing Directly on the Silicon Surface