Improved Pattern Transfer in Soft Lithography Using Composite Stamps

Abstract

Composite stamps composed of two layerssa stiff layer supported by a flexible layersextend the capabilities of soft lithography to the generation of 50-100-nm features. The preparation of these stamps was adapted from a procedure originally developed by Schmid et al. (Macromolecules 2000, 33, 3042) for microcontact printing. This paper demonstrates how pattern transfer using other soft lithographic techniquessmicromolding in capillaries, microtransfer molding, and phase-shifting lithographyscan be improved using two-layer stamps relative to stamps made of Sylgard 184 poly(dimethylsiloxane).

Link

Improved Pattern Transfer in Soft Lithography Using Composite Stamps