Process for preparing zinc oxide nano needle structures by chemical vapor deposition

Abstract

A method for manufacturing a zinc oxide nano needle structure is provided to grow the zinc oxide nano needle structure without using a catalyst by changing a temperature of a substrate in two steps in a chemical vapor deposition process. An SAM(Self-Assembled Molecule) film is patterned on a substrate. A zinc source and an oxygen source are introduced on the substrate and a CVD(Chemical Vapor Deposition) process is performed on the substrate except for a region for the SAM, so that a zinc oxide seed layer is formed. A CVD process is performed on the zinc oxide seed layer, so that a zinc oxide nano needle is vertically grown on the zinc oxide seed layer. The SAM is performed by a micro-contact printing scheme.

Link

Process for preparing zinc oxide nano needle structures by chemical vapor deposition